NANOTRIBOLOGICAL INVESTIGATIONS ON ADESION EFFECT APPLIED TO MEMS MATERIALS

Corina BIRLEANU, Marius PUSTAN, Cristian DUDESCU, Ovidiu BELCIN, Zygmunt RYMUZA

Abstract


The roughness effect on adhesion of different MEMS materials is investigated and presented in this paper. Asperities of rough surfaces can either reduce or increase the contact area of interacting MEMS components. As a consequence, roughness of substrates cannot be eliminated from tribological behavior of MEMS materials, and this surface characteristic must be taken into consideration in the interpretation of stiction and friction. Stiction is one of the main failure causes of microsystems with compliant structural members. It is influenced by the material properties, surface characteristics and environmental conditions. Experimental investigations are performed using the spectroscopy in point mode of an atomic force microscope (AFM) in order to measure the adhesion force between AFM probes and MEMS materials with different roughness.

Key words: MEMS materials, roughness, interaction forces, stiction, atomic force microscope

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References


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