UNCERTAINTY EVALUATION ON LINEWIDTH MEASUREMENT USING AN OPTICAL MICROSCOPIC SYSTEM CALIBRATED BY BOTH A LASER INTERFEROMETER AND A LINEWIDTH STANDARD

Chu-Shik Kang, Jae Yong Lee, Sunghoon Eom, Jong-Ahn Kim, Jae Heun Woo

Abstract


An optical microscopic system for precise linewidth measurement has been developed. The system is capable of measuring linewidths that are either narrower or wider than the microscope’s field of view, and can be applied to both transparent and opaque lines. It is calibrated using a laser interferometer and a linewidth standard, the latter calibrated by a foreign National Metrology Institute. This paper presents the measurement system and provides a detailed evaluation of the measurement uncertainty.


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References


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