MECHANICAL PROPERTIES PREDICTION FOR TITANIUM NITRIDE THIN FILMS
Real-world applications require materials with specific properties which most of the time are determined with expensive equipment and time consuming tests. The solution proposed in this paper consists in acquiring an input data set based on existing experimental investigations and building an estimator using the obtained input data set. The estimator chosen for predicting the material properties of the thin films investigated in this paper is the Kriging predictor. Four samples of titanium nitride thin films deposited at different temperatures are considered and the hardness and Young’s modulus are determined for each of them. Based on the experimental data the appropriate Kriging estimator is established and the values for the two mechanical properties are predicted at intermediary temperatures.
Key words: mechanical properties, thin films, kriging estimator, atomic force microscopy, nanoindentation.
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