SIZE EFFECT ON THE DYNAMICAL BEHAVIOUR OF ELECTROSTATICALLY ACTUATED MEMS RESONATORS

Marius PUSTAN, Corina BIRLEANU, Cristian DUDESCU, Ovidiu BELCIN, Jean-Claude GOLINVAL

Abstract


The size effect on the dynamical response of electrostatically actuated MEMS resonators is analyzed and presented in this paper. The interest is to measure the frequency response of microresonators and to estimate the energy loss coefficient. The loss of energy in a vibrating structure is experimentally estimated measuring the quality factor. The quality factor is a resonator parameter that gives information about the energy dissipated during one cycle of oscillation. The total energy dissipation depends on the air damping and on the structural thermoelastic effect. MEMS resonators under investigations are polysilicon microcantilevers fabricated in different geometrical dimensions.            

 Key words: Multiphysics coupling, MEMS resonators, frequency response, quality factor, loss of energy


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References


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