ENHANCED 3D SURFACE PROFILOMETRY OF CHROMATIC CONFOCAL MICROSCOPY WITH SPATIALLY VARYING RICHARDSON-LUCY DECONVOLUTION

Ching-Chia YEN, Han-Ju TSAI, Liang-Chia CHEN

Abstract


This study introduces a novel optical design in line-scan chromatic confocal microscopy to reduce crosstalk, using a Galvano mirror and an innovative Spatial Light Modulator (SLM) with Liquid Crystal On Silicon (LCoS) to replace the detector slit. This allows direct PSF measurement using Fourier optics and convolution theory. The system employs Richardson-Lucy deconvolution for image restoration, successfully refining micrometer-level features in micron-scale concentric circular gratings and bumps, confirmed by white light interference comparisons. Our measurement results, indicate that the approach significantly minimizes morphological errors, with line bias and depth deviation improved to under 1 micron and 0.2 microns, respectively, enhancing feature resolution in both lateral and axial dimensions to sub-micrometer accuracy.


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