NUMERICAL AND ANALYTICAL STUDY ON THE DEFLECTION OF THE V-BEAM THERMAL SENSOR

Radu-Ștefan CHIOREAN, Mircea Cristian DUDESCU, Mihail HĂRDĂU

Abstract


The purpose of this paper is to present some results on the determination of the V-beam thermal sensor’s deflection. The influence of its geometrical parameters on the output deflection was tested while also taking into account the deformation of the substrate. The finite element (FE) studies that were performed on virtual replicas of the V-beam thermal sensors led to the validation of the theoretical model. Key words: V-beam thermal sensor, thermal load, substrate deformation

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References


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